| 000 | 01048nam a2200301zi 4500 | ||
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| 005 | 20220228105341.0 | ||
| 008 | 151123s2015 gw a 000 0 eng d | ||
| 020 | _a9783527335459 | ||
| 035 | _aMX001001859126 | ||
| 040 |
_aN$T _bspa _erda _cN$T _dUNAMX |
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| 050 | 4 |
_aTK7875 _bR47 |
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| 245 | 0 | 0 |
_aResonant MEMS : _bfundamentals, implementation and application / _cedited by Oliver Brand, Isabelle Dufour, Stephen M. Heinrich and Fabien Josse |
| 264 | 1 |
_aWiesbaden : _bWiley-VCH Verlag, _c[2015] |
|
| 264 | 4 | _a©2015 | |
| 300 |
_a483 páginas : _bilustraciones |
||
| 490 | 0 | _aAdvanced micro and nanosystems | |
| 650 | 4 |
_aSistemas microelectromecánicos _xDiseño y construcción |
|
| 650 | 4 | _aMicrofabricación | |
| 650 | 4 | _aResonancia | |
| 700 | 1 |
_aBrand, Oliver, _eeditor |
|
| 700 | 1 |
_aDufour, Isabelle, _eeditor |
|
| 700 | 1 |
_aHeinrich, Stephen M., _eeditor |
|
| 700 | 1 |
_aJosse, Fabien, _eeditor |
|
| 336 |
_atexto _2rdacontent |
||
| 337 |
_asin medio _2rdamedia |
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| 338 |
_avolumen _2rdacarrier |
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| 999 |
_c38020 _d38020 |
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