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_aBhattacharyya, Bijoy, _eautor |
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_aElectrochemical micromachining for nanofabrication, MEMS and nanotechnology / _cBijoy Bhattacharyya |
| 264 | 1 |
_aOxford, United Kigndom : _bWilliam Andrew, _c[2015] |
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| 264 | 4 | _c©2015 | |
| 300 |
_a270 páginas : _bilustraciones |
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| 650 | 4 | _aSistemas microelectromecánicos | |
| 650 | 4 | _aNanotecnología | |
| 650 | 4 | _aSistemas microelectromecánicos | |
| 336 |
_atexto _2rdacontent |
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_asin medio _2rdamedia |
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