000 00934nam a2200265zi 4500
005 20220228105247.0
008 090604s2009 xxua b 000 0 eng d
020 _a9781420045680
035 _aMX001001179989
040 _aBTCTA
_bspa
_cBTCTA
_dBAKER
_dYDXCP
_dBWX
_dOCLCQ
_dUKM
_dCDX
_dDLC
_dUNAMX
050 0 _aTK7875
_bL58
082 0 4 _a621.381
_222
100 1 _aLiu, Ai-Qun,
_eautor
245 1 0 _aPhotonic MEMS devices :
_bdesign, fabrication and control /
_cAi-Qun Liu ; co-authors, Xuming Zhang ... [y otros.]
264 1 _aBoca Raton, Florida :
_bCRC Press,
_cc2009
300 _a483 páginas :
_bilustraciones
490 0 _aOptical science and engineering series ;
_v136
650 0 _aSistemas microelectromecánicos
650 0 _aFotónica
700 1 _aZhang, Xuming,
_ecolaborador
336 _atexto
_2rdacontent
337 _asin medio
_2rdamedia
338 _avolumen
_2rdacarrier
999 _c34969
_d34969