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_aMEMS : _bintroduction and fundamentals / _cedited by Mohamed Gad-El-Hak |
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_aBoca Raton : _bCRC Press/Taylor & Francis, _c2006 |
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_a1 volumen (en varias paginaciones) : _bilustraciones |
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| 490 | 0 | _aMechanical engineering series | |
| 650 | 0 | _aSistemas microelectromecánicos | |
| 650 | 0 | _aMicroelectrónica | |
| 650 | 0 | _aNanotecnología | |
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_aGad-el-Hak, Mohamed, _d1945- _eeditor |
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_aMechanical engineering series _x 0941-5122 |
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_asin medio _2rdamedia |
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