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| 005 | 20220228105130.0 | ||
| 008 | 020909c20022002flua b 001 0 eng | ||
| 020 | _a0849312620 (papel alcalino) | ||
| 035 | _aMX001000928961 | ||
| 040 |
_aDLC _cDLC |
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| 041 | _aENG | ||
| 050 | 0 | 0 |
_aTK7875 _bL965 |
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_a621.381 _221 |
| 100 | 1 |
_aLyshevski, Sergey Edward _eautor |
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| 245 | 1 | 0 |
_aMEMS and NEMS : _bsystems, devices, and structures / _cSergey Edward Lyshevski |
| 264 | 1 |
_aBoca Raton, Florida : _bCRC Press, _cc2002 |
|
| 300 |
_a461 páginas : _bilustraciones |
||
| 490 | 0 | _aNano- and microscience, engineering, technology, and medicine series | |
| 650 | 0 | _aSistemas microelectromecánicos | |
| 336 |
_atexto _2rdacontent |
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| 337 |
_asin medio _2rdamedia |
||
| 338 |
_avolumen _2rdacarrier |
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| 999 |
_c30497 _d30497 |
||