Theory and practice of planar magnetron sputtering / Chen J-iefeng. 

 - México, D. F. : UNAM, Instituto de Ingeniería 
 - 40 p. 
 - Serie E / Instituto de Ingeniería ; E-63 .
<br/><br/> "Project in collaboration with the Institute of Physics, UN-AM""Sponsored by Programa Universitario de Energía, UNAM"