TY  - BOOK
AU  - Bhattacharyya,Bijoy
TI  - Electrochemical micromachining for nanofabrication, MEMS and nanotechnology
SN  - 9780323327374
AV  - TJ1191.5 E54
U1  - 620.5 
PY  - 2015///]
CY  - Oxford, United Kigndom
PB  - William Andrew
KW  - Sistemas microelectromecánicos
KW  - Nanotecnología
ER  -