Micro-manufacturing engineering and technology / 
edited by Yi Qin 
 - 1st. ed. 
 - XIV, 414 páginas :  ilustraciones 
 - Micro & Nano Technologies .
<br/><br/><label>ISBN: </label>9780815515456 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microfabricación<br/>Nanotecnología
<br/><br/><label>LC Class. No.: </label>TA418.9N35  / M527