Liu, Ai-Qun, <br/><br/>
Photonic MEMS devices :  design, fabrication and control / 
Ai-Qun Liu ; co-authors, Xuming Zhang ... [y otros.] 
 - 483 páginas :  ilustraciones 
 - Optical science and engineering series ;  136 .
<br/><br/><label>ISBN: </label>9781420045680 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Sistemas microelectromecánicos<br/>Fotónica
<br/><br/><label>LC Class. No.: </label>TK7875  / L58 
<br/><br/><label>Dewey Class. No.: </label>621.381