TY  - BOOK
AU  - Lyshevski,Sergey Edward
TI  - MEMS and NEMS: systems, devices, and structures 
T2  - Nano- and microscience, engineering, technology, and medicine series
SN  - 0849312620 (papel alcalino)
AV  - TK7875 L965
U1  - 621.381 21
PY  - 2002///
CY  - Boca Raton, Florida
PB  - CRC Press
KW  - Sistemas microelectromecánicos
ER  -