Vista normal Vista MARC Vista ISBD

Theory and practice of planar magnetron sputtering / Chen J-iefeng. - México, D. F. : UNAM, Instituto de Ingeniería - 40 p. - Serie E / Instituto de Ingeniería ; E-63 .

"Project in collaboration with the Institute of Physics, UN-AM""Sponsored by Programa Universitario de Energía, UNAM"