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Wong, Alfred Kwok-Kit,

Resolution enhancement techniques in optical lithography / Alfred Kwok-Kit Wong - xvii, 214 páginas : ilustraciones - Tutorial texts in optical engineering ; v. TT 47 .

ISBN: 0819439959 (rustica)

Subjects--Topical Terms:
Circuitos integrados--Diseño y construcción
Microlitografía

LC Class. No.: TK7874 / W65

Dewey Class. No.: 621.3815/31