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Micromachining of engineering materials / edited by Joseph McGeough - x, 397 páginas : ilustraciones - Mechanical engineering ; 139 .

ISBN: 0824706447 (papel alcalino)

Subjects--Topical Terms:
Sistemas microelectromecánicos
Materiales

LC Class. No.: TJ1191.5 / M53

Dewey Class. No.: 671.3/5